Download Advanced Technologies Based on Wave and Beam Generated by Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova PDF

By Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)

This quantity relies at the lectures on the NATO complicated research Institute, entitled "Advanced applied sciences according to Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from might 22 until June 1, 1998. It attracted nearly a hundred individuals from sixteen assorted international locations. The assembly mixed types of scientists from complex specialists to aspiring younger researchers. It geared toward stimulating destiny improvement by means of providing-across borders- cross-fertilization and exchanges among formerly unconnected teams. this is often mirrored within the contents of the quantity which covers the lectures given. The ebook additionally includes in a moment half forty three poster displays more often than not from more youthful individuals with useful complementations and specifica­ tions to the lectures. With its subject matters the complex research Institute constitutes the 1st try to compile in an equipped demeanour 3 parts of labor on plasma applied sciences: complicated efforts according to wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

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An example of this is the troughguide arrangement [8]. In the second type of these wave sustained discharges, power is being transferred to the discharge by the electric field of a guided wave. The wave properties are then dependent on the discharge properties and vice-versa. This is particularly evident in the case of SWDs where the plasma column is an essential part of the propagating structure. One can further consider two kinds of transmission-line discharges (Note that, in both these cases, the plasma can be sustained either by a traveling or a standing wave): 1) The wave propagates along a waveguiding structure external to the dielectric discharge tube and, owing to this, the plasma colunm does not extend beyond this structure; an example is the Large Microwave Plasma (LMP) system [9].

Annular Discharge Around a Central Dielectric Tube (Rauchle, 1995) The Universitiit Stuttgart group investigated and applied to surface treatment a plasma source called Duo-plasmaline [39,40]. The spatial structure of the discharge is shown in figure 4 [40]. Microwave power is supplied at both ends of the device from coaxial lines. Discharge is sustained in a vacuum chamber by two surface waves guided in opposite directions by the interface between the external side of the dielectric tube and the created plasma.

A large part of this theoretical work has been carried out by Professor Ferreira's group [45]. Recent modeling achievements further clarified the contribution to 8 from other phenomena. g. g. 48,49]. g. 46,48]. Pulsed operation ofSWDs has been investigated by the Cordoba group [50]. The investigation of magnetized SWDs has also provided significant new results. For instance, operation at f=200 MHz shows that the plasma can be ignited in the sub-mTorr regime in absence of magnetic field whereas, at 2450 MHz, it requires roc/~!

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